Plasma Etching
Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy... 725.56 KB 54 downloads
Measurements of neutral and ion composition, neutral temperature, and electron energy...
Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas. 180.34 KB 55 downloads
Mass spectrometry studies of resist trimming processes in HBr/O2 and Cl2/O2chemistries. ...
Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas 201.40 KB 57 downloads
Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas. ...
Ion-Enhanced Chemical Etching of HfO2 for Integration in Metal–Oxide–Semiconductor Field... 172.17 KB 51 downloads
Ion-enhanced chemical etching of HfO2 for integration in metal–oxide–semiconductor...
Ion Energy Distributions and Optical Emission Spectra in NF3-Based Process Chamber... 396.70 KB 60 downloads
Ion energy distributions and optical emission spectra in NF3-based process chamber...
Investigation of the Outgassing Characteristics of the Materials Comprising a Plasma... 176.70 KB 45 downloads
Investigation of the outgassing characteristics of the materials comprising a plasma...
In Situ Characterization of Residues Formed on a Plasma-Etching Chamber 279.87 KB 33 downloads
In situ characterization of residues formed on a plasma-etching chamber. ...
Identification of volatile products in low pressure hydrocarbon electron resonance reactive ion etching of InP and GaAs. 566.31 KB 29 downloads
Identification of volatile products in low pressure hydrocarbon electron resonance...
Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas chemistry. 236.40 KB 31 downloads
Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas...
