Products for Residual Gas Analysis
Residual Gas Analyser Solutions
Discover Hiden Analytical’s residual gas analyser range for vacuum diagnostics, process monitoring, and research applications. Browse our residual gas analysis systems to compare RGA products for different vacuum environments.
RGA Series
Systems for the examination of components present in a vessel or evolved from a process. Measures the concentration of gases and vapours in real time.
HALO RGA
A Residual gas analyser for vacuum fingerprint analysis, leak detection and trend analysis.
Ion Source Options
A range of electron impact ion sources that can be supplied with any of our residual gas analysers. Configures residual gas analysers for specific applications, molecular beam analysis for example.
HMT
A dual mode RGA system for vacuum diagnostics and process monitoring without differential pumping. Measures the residual gases, process contaminates and provides for leak detection.
HAL 201 RC
A Residual Gas Analyser configured for demanding UHV applications. Measures the concentration of gases and vapours in real time.
HALO 201 MBE
A residual gas system configured for molecular beam epitaxy applications. Measures residual gases and provides for contamination and leak detection in MBE systems.
EPIC / EPIC 1000 Series
A system for UHV analysis of neutrals, radicals and ions. Measures the ions, neutrals, and partial pressures in UHV/XHV.
IDP / IDP 1000 Series
A system for analysis of ions, neutrals and radicals in UHV desorption studies. Measures ions and neutrals in electron and photon stimulated desorption.
3F Series / 1000 Series RGA
A system for high precision scientific and process applications. Measures the partial pressures of residual gases with ultra high resolution and extended mass range options to 1000 AMU.
XBS
A system for multiple source monitoring in MBE deposition applications. For molecular beam analysis and deposition rate control.
3F PIC
Hiden’s 3F PIC Series Quadrupoles are high precision triple filter analysers with digital detectors for ultimate sensitivity and time resolution in UHV TPD applications.
DLS-1
A system for tokamak/torus fusion research. Measures the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.
DLS-2 / DLS-2X
Dual switching mass spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases.
DLS-20
Unique Dual-zone Switching Ultra High Resolution Quadruple Mass Spectrometer. Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases.
HAL 101X
A system for tokamak/torus fusion research with remote analyser mounting up to 140m. Includes the DLS-1 system TIMS mode for Measurement the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.
Key Residual Gas Analyser Benefits and Features
Our residual gas analyser range supports users who need to understand gases and vapours in vacuum systems and vacuum-related processes. Our products include residual gas analysis mass spectrometer systems and other products for different research and process requirements.
Key Benefits
- Support vacuum diagnostics and RGA analysis
- Identify residual gases and vapours
- Support leak detection and trend analysis
- Support process monitoring in vacuum systems
- Understand vacuum quality and potential contamination sources
- Support application-specific RGA product selection
- Provide product options for UHV, process monitoring, molecular beam, desorption, and MBE-related workflows
Key Features
- Quadrupole mass spectrometer-based RGA systems
- Systems for measuring gases and vapours in vessels or vacuum processes
- Options for vacuum fingerprint analysis, leak detection, and trend analysis
- Ion source options for specific residual gas analysis applications
- Systems configured for UHV applications
- Systems configured for MBE applications
- Options for analysing neutrals, radicals and ions in UHV or XHV environments.
