Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

Jan 10, 2022

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Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

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Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices

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