Tailoring phase formation and mechanical properties of low-temperature-grown Al-rich CrAlWN films by selective metal-ion bombardment during high-power impulse magnetron sputtering

Jul 29, 2026

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Tailoring phase formation and mechanical properties of low-temperature-grown Al-rich CrAlWN films by selective metal-ion bombardment during high-power impulse magnetron sputtering

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Tailoring phase formation and mechanical properties of low-temperature-grown Al-rich CrAlWN films by selective metal-ion bombardment during high-power impulse magnetron sputtering

Tailoring phase formation and mechanical properties of low-temperature-grown Al-rich CrAlWN films by selective metal-ion bombardment during high-power impulse magnetron sputtering

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