Plasma Etching Selectivity of ZrO2 to Si in BCl3/Cl2 Plasmas

Oct 2, 2016

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Plasma Etching Selectivity of ZrO2 to Si in BCl3/Cl2 Plasmas

Plasma etching selectivity of ZrO₂ to Si in BCl₃/Cl₂ plasmas.

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Plasma Etching Selectivity of ZrO2 to Si in BCl3/Cl2 Plasmas

Plasma Etching Selectivity of ZrO2 to Si in BCl3/Cl2 Plasmas

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