Plasma diagnostics and deposition of functional zirconia thin films by reactive magnetron sputtering

Jul 27, 2026

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Plasma diagnostics and deposition of functional zirconia thin films by reactive magnetron sputtering

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Plasma diagnostics and deposition of functional zirconia thin films by reactive magnetron sputtering

Plasma diagnostics and deposition of functional zirconia thin films by reactive magnetron sputtering

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