Control of metal ion acceleration via gas rarefaction in synchronized HiPIMS for improved epitaxial AlN growth

Jul 29, 2026

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Control of metal ion acceleration via gas rarefaction in synchronized HiPIMS for improved epitaxial AlN growth

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Control of metal ion acceleration via gas rarefaction in synchronized HiPIMS for improved epitaxial AlN growth

Control of metal ion acceleration via gas rarefaction in synchronized HiPIMS for improved epitaxial AlN growth

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